FEI Scios DualBeam FIB SEM instrument


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Scios datasheet

Precision dualbeam FIB-SEM for 3D analyses and TEM lamella preparation.

Key Features:

  • Ga+ ion beam system enables site-specific milling for sub-surface analysis or lamella preparation for TEM analyses.
  • Features elemental and crystallographic analysis via Oxford Aztec EDS and EBSD systems.
  • Located at University of Missouri’s Research Reactor (MURR) to facilitate handling of irradiated media.

 

example image from FEI Scios FIB-SEM
Example image: Surface defects of a stainless steel revealed to be caused by chemical inhomogeneities in the sample interior as observed via imaging (left) and elemental mapping (right) post- FIB milling.